Insulating U-Groove Silicon Carbide Ceramic Component For Semiconductor Equipment And Devices In Corrosive Environments

U-Groove Silicon Carbide Ceramic Structural Component

Product Introduction

This product is a U-groove silicon carbide (SiC) ceramic structural component manufactured using hot-press sintering technology. Silicon Carbide (SiC), representing the third generation of engineering ceramics, possesses exceptional mechanical properties and thermal stability. The product features a unique U-shaped block design with a precision groove on the top and a central circular hole at the bottom, embodying a perfect combination of functionality and structural integrity. Its dark gray surface undergoes precision grinding, ensuring accurate dimensions and easy installation. It is specifically developed for harsh industrial environments involving high temperatures and severe wear.

Primary Applications

• Mechanical Guidance and Positioning: Widely used in linear guide sliders, guide grooves, and other positioning elements in automation equipment and precision machine tools.

• High-Temperature Furnace Components: Serves as high-temperature load-bearing parts such as roller hearth kiln roller supports and sintering fixtures.

• Semiconductor Equipment Parts: Used as insulating supports and carrier blocks in wafer handling and heat treatment equipment.

• Chemical Equipment Components: Suitable for pump valve seal bases and structural supports in corrosive environments.

Product Advantages

• Exceptional Wear Life: Hardness exceeds HRA 92, offering wear resistance more than 10 times that of tool steel.

• Superior High-Temperature Performance: Can operate long-term in environments up to 1650°C, maintaining over 85% of its strength at high temperatures.

• Excellent Dimensional Stability: Low coefficient of thermal expansion (4.5×10⁻⁶/°C) ensures dimensional accuracy in high-temperature environments.

• Outstanding Corrosion Resistance: Excellent resistance to acid and alkali corrosion, suitable for corrosive working conditions.

• Lightweight Design: Density is only 3.1 g/cm³, reducing weight by over 60% compared to heavy metal components.

Specifications Table

Manufacturing Process

Silicon carbide fine powder preparation → Additive formulation → Ball milling and mixing → Spray drying → Hot press sintering → CNC precision machining → Non-destructive testing → Dimensional inspection → Surface treatment → Final packaging.

Usage Instructions

1. Installation Preparation: Ensure the mounting surface is flat, clean, and free of burrs and oil contamination.

2. Fixing Method: It is recommended to use high-temperature adhesive combined with mechanical clamping plates for fixation; avoid direct impact during installation.

3. Clearance Control: Allow for a thermal expansion gap of 0.1-0.3mm during installation.

4. Maintenance Points: Regularly inspect the surface for wear and avoid localized overload.

After-Sales Service

An 18-month quality warranty is provided, along with lifetime free technical support. Custom product development is supported, and professional selection guidance is offered. Customer files are established for quality tracking services.

FAQ

1. Q: Can the U-groove dimensions be customized?
   A: Yes, complete customization is supported. Non-standard machining can be performed based on provided drawings, with minimum tolerances reaching ±0.01mm.

2. Q: What are the advantages compared to alumina ceramics?
   A: Wear resistance is improved by 3 times, thermal conductivity is increased by 5 times, and the maximum service temperature is raised by 400°C.

3. Q: Is it suitable for vacuum environments?
   A: Yes, the product's vacuum outgassing rate is <10⁻⁸ Pa·m³/s, making it suitable for high vacuum applications.