PRODUCTS

Home > Products > Alumina Ceramic > High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance

Catagories

Ceramic Nozzles

(17)

Contacts

Contacts: Ms. Lu

Tel: 86-579-82791257

Fax: 86-579-82791257

Contact Now

Mail Us

High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance

Name: High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance
Brand: Dayoo Advanced Ceramic Co.,Ltd
SKU: depend on the actual product
Availability: InStock

Product Details

Place of Origin: Made in China，Zhejiang，Jinhua

Brand Name: Dayoo

Certification: GB/T 19001-2016/ISO 9001:2015

Model Number: depend on the actual product

Payment & Shipping Terms

Minimum Order Quantity: as negotiated and agreed

Price: as negotiated and agreed

Packaging Details: Carton，Wooden Case

Delivery Time: depend on the actual product

Payment Terms: FOB

Supply Ability: Factory

Get Best Price

Product Details

Product Description

Highlight: 
                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                                alumina ceramic shield rings, semiconductor etching ceramic rings, high temperature resistant alumina rings
                              

Volume Resistivity:	10^14 Ω·cm	Coefficient Of Thermal Expansion:	7 - 8 X 10^-6 /°C
Mechanical Strength:	Very High	Fracture Toughness:	3 - 4 MPa·m^0.5
Dielectric Strength:	10 - 15 KV/mm	Bulk Density:	>3.63
Maximum Use Temperature:	1700c	Flexural Strength:	200 - 400 MPa
Low Dielectric Loss:	0.0002	Applications:	Electrical Insulators, Wear Parts, Cutting Tools, Medical Devices
Chemical Composition:	Al2O3 (Aluminum Oxide)	Max Operating Temperature:	1700°C
Electrical Insulation:	High	Purity:	Typically 95% - 99.9%
Temperature Resistance:	Up To 1600°C

Volume Resistivity:	10^14 Ω·cm
Coefficient Of Thermal Expansion:	7 - 8 X 10^-6 /°C
Mechanical Strength:	Very High
Fracture Toughness:	3 - 4 MPa·m^0.5
Dielectric Strength:	10 - 15 KV/mm
Bulk Density:	>3.63
Maximum Use Temperature:	1700c
Flexural Strength:	200 - 400 MPa
Low Dielectric Loss:	0.0002
Applications:	Electrical Insulators, Wear Parts, Cutting Tools, Medical Devices
Chemical Composition:	Al2O3 (Aluminum Oxide)
Max Operating Temperature:	1700°C
Electrical Insulation:	High
Purity:	Typically 95% - 99.9%
Temperature Resistance:	Up To 1600°C

High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance

High Purity Alumina Ceramic Shield Rings

Alumina ceramic shield rings are high-performance annular protective components manufactured from high-purity alumina (Al₂O₃ content 95%-99.99%). These ivory white or beige-yellow components feature dense texture and high surface finish, designed to provide protection, isolation, support, and insulation functions in various equipment applications.

Primary Applications

Application Field	Specific Uses
Semiconductor Manufacturing	Etching equipment chamber protection, plasma bombardment barrier, deposition process mask
Vacuum Coating Equipment	Protective ring surrounding heaters and susceptors, sputtering process anti-deposition shield
Electronics and Electrical	High-voltage insulation shield rings, electronic component protective sleeves, vacuum feedthrough insulators
Chemical and Metallurgical	Reactor liner protection, high-temperature furnace supports, corrosion-resistant pipe sleeves
Mechanical Seals	Pump and valve seal shield rings, bearing protection rings, wear-resistant component bushings

Core Advantages

Excellent protective performance against plasma bombardment, chemical corrosion, and mechanical wear
Ultra-high hardness and wear resistance (Mohs hardness 9)
Excellent thermal stability with maximum operating temperature up to 1750-1800℃
Outstanding electrical insulation (volume resistivity >1×10¹⁴ Ω*cm)
Excellent chemical stability resistant to acid and alkali corrosion
Precise dimensional control with micron-level tolerances
Non-toxic and environmentally friendly material

Technical Specifications

Parameter	Typical Value/Range	Remarks
Alumina Content	95% - 99.99%	Customizable according to requirements
Bulk Density	3.64 - 3.98 g/cm³	Increases with purity
Flexural Strength	310 - 380 MPa	Up to 500MPa or more
Compressive Strength	2550 - 3500 MPa	Extremely strong load-bearing capacity
Hardness	14 - 30 GPa (≈1440-3060 kg/mm²)	Increases with purity
Dielectric Strength	16.9 - 24 kV/mm	Excellent electrical safety performance
Volume Resistivity	>1×10¹⁴ Ω*cm	Extremely high at room temperature
Thermal Expansion Coefficient	7.2 - 8.4 ×10⁻⁶ /℃ (20-1000℃)	Good dimensional stability
Thermal Conductivity	32 - 42 W/m*K	Increases with purity
Maximum Operating Temperature	1600 - 1800 ℃	Under no-load conditions
Thermal Shock Resistance	220 - 320 ℃	Withstands rapid temperature changes
Water Absorption	0%	Fully dense, good airtightness
External Dimensions	OD 50-500mm, Thickness 5-50mm	Customizable according to drawings

Manufacturing Process

Raw Material Preparation: High-purity alumina powder ball-milling and mixing
Molding Process: Dry pressing, isostatic pressing, or hot pressing casting
Green Body Machining: Trimming after molding with machining allowance
High-Temperature Sintering: Pressureless sintering at 1600-1700℃
Precision Machining: Grinding and lapping using diamond abrasives
Quality Inspection: Full dimensional and performance testing
Cleaning and Packaging: Vacuum or cleanroom packaging

Installation & Usage Guidelines

Installation Precautions:

Confirm installation orientation and positioning surfaces
Perform trial assembly before formal installation
Use soft pads or gloves when handling
Ensure clean contact surfaces free of particles
Consider shrink fit assembly for interference fits

After-Sales Service

Customization service for dimensions, purity, and tolerances
Professional technical consultation and design guidance
100% inspection before shipment with material reports
24-hour response to customer issues
Strict batch-to-batch consistency control
Small batch support for R&D and trial production

Frequently Asked Questions

Q1: What is the difference between alumina ceramic shield rings and ordinary ceramic rings?

A: Shield rings are specifically designed for protection functions with precise positioning surfaces, step structures, and strictly controlled fit dimensions to ensure accurate resetting with each replacement.

Q2: What temperature can the product withstand? How is its thermal shock resistance?

A: Maximum operating temperature reaches 1750-1800℃ for high-purity alumina. Thermal shock resistance is approximately 220-320℃, capable of withstanding thermal shock tests with 500℃ temperature differences.

Q3: What level of dimensional accuracy can the shield rings achieve?

A: Standard products achieve outer and inner diameter tolerances of ±0.05mm. Precision grinding can achieve tolerances up to ±0.01mm, with concentricity and parallelism controlled within 0.02mm.

Q4: Are ceramic shield rings easy to break? What should be noted during installation?

A: Alumina ceramics have high hardness but some brittleness. Avoid hammering, dropping, or forced hammering during installation. Use shrink fit assembly or flexible gaskets, and wear gloves when handling.

Q5: Can shield rings be reused after cleaning?

A: Yes, as long as there are no cracks or chipping on the surface. Inspect critical dimensions and surface condition after each cleaning cycle.

Q6: Do you provide samples for testing? What is the minimum order quantity?

A: Small batch samples are available for testing and verification. Minimum order quantities for batch orders are negotiable based on product size, with special support for R&D requirements.

Tags:

High-Strength Alumina Ceramic: Professional Solutions For Precision Bearings, Insulating Components & Corrosion-Resistant Liners

Get Best Price

Alumina Ceramic

Zirconia Ceramics

Silicon Nitride Ceramics

Silicon Carbide Ceramics

Ceramic Beams

Ceramic Arm

Ceramic Nozzles

High Purity Alumina Ceramic Shield Rings For Semiconductor Etching Equipment | Vacuum Chamber Protection Rings With Custom Sizes And High Temperature Resistance

alumina ceramic shield rings

semiconductor etching ceramic rings

high temperature resistant alumina rings

chemical resistance alumina oxide ceramic,

electrical insulation alumina parts,

electrical insulation alumina custom parts

High-Strength Alumina Ceramic: Professional Solutions For Precision Bearings, Insulating Components & Corrosion-Resistant Liners

Alumina Ceramic Lined Pipes & Valves: The Superior Industrial Abrasion & Corrosion Resistance Solution

Alumina Ceramic Guide Bushings: Core Guiding Components For Precision Machinery

Alumina Ceramic Insulation Seals: Ideal Choice For High-Performance Industrial Applications

Alumina Ceramic Corrosion-Resistant Pipeline Connectors: Reliable Solution For Fluid Transport Systems

Alumina Ceramic Outstanding Electrical Insulation And Mechanical Strength For Precision Instruments

Alumina Ceramic: Core Basic Material For High-End Equipment Manufacturing

Alumina Ceramic: High-Performance Material Solution For Precision Industry

Alumina Ceramic: Expert In High-Performance Insulation And Wear-Resistant Solutions

Alumina Ceramic Insulating Sleeves/Housings: Reliable High-Performance Electrical Insulation Solutions

Alumina Ceramic Heat Dissipation Substrates And Filtration Components: Core Solutions For Electronics And Precision

Alumina Ceramic

Zirconia Ceramics

Silicon Nitride Ceramics

Silicon Carbide Ceramics

Ceramic Beams

Ceramic Arm

Ceramic Nozzles